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Nichia 's Shuji Nakamura: Dream of the Blue Laser Diode

2008-07-31 22:37:32

GO TO: The Interviews The history of science has more than its share of

underdog stories researchers working off the beaten track who succeed where

others can t but few of them, if any, are as remarkable as the story of Shuji

Nakamura and the blue laser diode. For decades the blue laser was the ultimate

dream in laser technology. The reason was a simple combination of physics and

market economics. Blue light has the shortest wavelength of visible light.

Build a blue laser diode, and you could quadruple the amount of data that could

be read and stored on a compact disc, a CD-ROM, or a digital video disc (DVD)

player. With red and green laser diodes already on the shelves, blue was the

last of the primary colors left to tackle, and if that could be done, one could

imagine a device that combined blue, red, and green and emitted white light,

perhaps putting the light bulb as we know it out of business.

"I actually thought it looked very easy to make blue LEDs," says Shuji Nakamura

of Nichia Chemical Industries Ltd., Tokushima, Japan. "I thought, blue means I

just have to change the color I just have to change the material."

For two decades, researchers working for the biggest players in the electronics

industry, from RCA and Hewlett-Packard to Matsushita and Sony, tried their

hands at the blue laser diode and failed. Nakamura, a self-described country

boy, did it while working for Nichia Chemical Industries Ltd. in Tokushima,

Japan.

Nakamura may have single-handedly, or virtually so, changed the technological

face of the world. And his research papers certainly reflect his influence: a

few years back his paper on "InGaN-based multi-quantum well-structure laser

diodes" (see the table on the next page, paper #1) was number 6 on the Science

Watch list of Red Hot Research Papers of 1996 one of only three

physical-sciences papers to rank among the year's most-cited reports. That

paper subsequently enjoyed a long run in the Physics Top Ten during 1997. More

recently, a 1998 paper, "Continuous-wave operation of InGaN/GaN/AlGaN-based

laser diodes grown on an epitaxially laterally overgrown GaN substrate" (Appl.

Phys. Lett., 72[2]:211-3, 1998), has also appeared among the Top Ten. "What I

have managed to achieve," Nakamura has written, "shows that anybody with

relatively little special experience in the field, no big money, and no

collaborations with universities or other companies, can achieve considerable

success alone when he tries a new research area without being obsessed with

conventional ideas and knowledge."

Nakamura, now 45, received both his bachelor's degree (1977) and master s

degree (1979) in electronic engineering from the University of Tokushima. In

1994, the same insititution awarded him a Doctor of Engineering degree. Since

1993, Nakamura has been head of the Department of Research & Development at

Nichia Chemical Industries. He spoke to Science Watch correspondent Gary Taubes

from his office in Tokushima.

SW: Your background was not in lasers at all. How did you get started in this

business, and why Nichia Chemical, which had no research in this area?

Nakamura: After I graduated from the University of Tokushima with a master s

degree in electrical engineering, I expected I would go to work for a big

consumer electronic company such as Sony or Toshiba. But while I was studying I

got married and my wife and I had a baby, and I wanted to raise my child in a

small city like Tokushima, because I thought Tokyo was too big and too noisy.

So I decided I would stay in Tokushima, but the only companies around were very

small. My advisor, Professor Osama Tada, knew the president of Nichia Chemical

and recommended me to him. At that time, the company was making a phosphor for

CRT tubes and fluorescent lamps.

SW: What did you start off doing?

Nakamura: Virtually everyone in the company was working to make this phosphor.

I managed to get to the R & D department, which was all of three people,

working on purified gallium metal. This was a source material of gallium

arsenide and gallium phosphide, which could be used to make red and infrared

light-emitting diodes. Since I had also studied semiconductor theory and

technology, and my interests were in material science, I thought I could do

some research to make a crystal of gallium phosphide.

SW: Did you succeed?

Nakamura: Yes. It took me three years. I made gallium phosphide crystals but my

sales were not good, because the bigger companies Toshiba and others were by

then selling the same product. Because Nichia was small and its name was not a

familiar one, I couldn t compete. My company wasn t happy with me. I quit the

gallium phosphide research and switched to gallium arsenide crystal growth in

1982. That can also be used to make infrared and red LEDs. I spent another

three years making a gallium arsenide crystal.

SW: How did that do?

Nakamura: It was the same story. By 1985, I had a product to sell, but again

sales were not good, because the same big companies were already selling the

same product. My company couldn t win the competition with the big companies

and the bosses weren t happy.

SW: You still weren't doing laser research?

Nakamura. Not yet. In 1985, I went to work on a gallium aluminum arsenide

epitaxial wafer. This is also used for LEDs. It s called an epitaxial wafer

because you use very thin layers to make the LEDs. So I spent the next three

years on that and came out with these gallium aluminum wafers for red and

infrared LEDs, but the same thing happened: Our sales were not good because the

bigger companies were already selling the same product by the time I was. The

quality of our LEDs and epitaxial wafers was just as good and the prices were

the same, but our company was small and local and couldn t compete. So once

again my company was not happy.

By this time the R&D department was down to just me the other two people left

because the results were so terrrible. I kept at it, but I was dispirited. For

ten years I had worked very hard to make these products. I worked twelve hours

a day, seven days a week, except holidays. I had a very, very small budget and

had to make everything I needed myself. I even made my own reactors the

furnaces needed to do the crystal work. The commercial reactors were too

expensive. I made three products all by myself, and still my salary and

position were not good at the company. My bosses always complained that my

results were terrible, because I spent a lot of money, as far as they were

concerned, and nothing sold. But for ten years I had been working to make these

LED materials and I knew at the time there were no high-brightness blue LEDs.

For LED researchers, this was a dream. But my bosses said it would be

impossible to create a blue LED at Nichia, because many big companies and many

research teams in big universities were trying to do it and were failing. So I

went to went to my company s chairman, Nobuo Ogawa, who was my professor s

friend, and the president Eji Ogawa, who was his son-in-law. I asked them if

they would let me do research on blue LEDs and they said "Sure. No problem. Go

ahead." I was very surprised. I asked them to give me a large budget so I could

do it. "Please give me three million U.S. dollars," and they said "Sure. No

problem." They had faith in me because, despite the dismal sales, I had

developed three new products for this company and I was the only one at Nichia

who had succeeded in making new products.

Weren t you worried? After all, you were going after the single hardest

challenge in your field.

Nakamura: For ten years, all of my research had been on LED material and LEDs.

I had lot of knowledge and experience in the research. I actually thought it

looked very easy to make blue LEDs. I thought, blue means I just have to change

the color that s all. I just have to change the material. To me, it looked very

easy.

SW: Why did you decide to use gallium nitride?

Nakamura: At that time, in 1989, there were two materials for making blue LEDs:

zinc selenide and gallium nitride. These had the right band gap energy for blue

lasers. But everybody was working on zinc selenide because that was supposed to

be much better. I thought about my past experience: if there s a lot of

competition, I cannot win. Only a small number of people at a few universities

were working with gallium nitride so I figured I'd better work with that. Even

if I succeeded in a making a blue LED using zinc selenide, I would lose out to

the competition when it came to selling it.

High-Impact Papers by Shuji Nakamura,

Published Since 1994

(Ranked by average citations per year)

Rank Paper Total

Citations Average

cites

per

year

1 S. Nakamura, et al., "InGaN-based multi-quantum-well-structure laser diodes,"

Japan J. Appl. Phys. 2, 35(1B):L74-1, 1996. 601 172

2 S. Nakamura, T. Mukai, M. Sengh, "Candela-class high-brightness InGan-AlGan

double heterostructure blue light-emitting diodes," Appl. Phys. Lett., 64

(13):1687-9, 1994. 572 104

3 Nakamura, et al., "Superbright green InGaN single-quantum-well structure

light-emitting diodes," Japan J. Appl. Phys. 2, 34(10B):1332-5, 1995. 207 59

4 Y. Narukawa, et al., "Role of self-formed InGaN quantum dots for exciton

localization in the purple laser-diode emitting at 420 nm," Appl. Phys. Lett.,

70(8):981-3, 1997. 142 57

5 S. Nakamura, et al., "High-brightness InGan blue, green and yellow

light-emitting diodes with quantum-well structure," Japan J. Appl. Phys. 2, 34

(7A):797-9, 1995. 238 53

SOURCE: ISI's Science Indicators Database, 1981 - June 1999

SW: What was it about zinc selenide that made it seem so superior?

Nakamura: The crystal quality of zinc selenide is very good. The dislocation

density, which is a measure of the number of defects in the crystal, was less

than 103 per cubic centimeter. Gallium nitride was more than 1010 per cubic

centimeter. And when people wanted to make reliable LEDs and laser diodes, they

knew that the dislocation density has to be lower than 103 or even 102. This is

just physics.

SW: That sounds almost insurmountable. How did you get around that defect

problem?

Nakamura: Well,first I needed a MOCVD reactor. MOCVD stands for "metal organic

chemical vapor deposition." Since I had money now, I bought a commercial

reactor and used it to grow gallium nitride crystals, but I couldn t get them

to grow on the substrate. So I spent two years modifying my commercial reactor

and succeeded in making what I called the two-flow MOCVD reactor. Usually a

MOCVD has only one gas flow. That s a reactive gas that blows parallel to the

substrate. I added another subflow, with an inactive gas blowing perpendicular

to the substrate. That suppressed the large thermal convection you get when you

re trying to grow a crystal at 1,000 degrees. Using this two-flow MOCVD I

succeeded in 1991 in making the highest quality of gallium nitride crystals in

the world. The dislocatoin density was still 1010. But there s another measure

of crystal quality, which is hole mobility, and I achieved a hole mobility of

200. That was a world record. The highest hole mobility ever achieved with

gallium nitride was 100.

SW: So the two-flow MOCVD reactor was the key breakthrough?

Nakamura: Yes suddenly it was easy to make any type of gallium nitride. In

1991, I made n-type gallium nitride. The following year I succeeded making

p-type using a thermal annealing technique. Now all gallium nitride researchers

use my technique for p-type gallium nitride. Another big breakthrough was

making the first single crystal of indium gallium nitride, which we needed for

an emitting layer. Finally at the end of 1993, I succeeded in making the first

commercial-based blue LEDs.

SW: Did you beat the competition this time?

Nakamura: There was no competition. Suddenly we announced the production of

blue LEDs. People working with zinc selenide announced that they had green

LEDs, but their brightness was an order of magnitude lower than ours and their

lifetime was very, very short. I made green LEDs in 1995 and also succeeded in

increasing the brightness of my blue LEDs using a quantum-well structure. Then

finally I switched to laser diodes.

SW: What was the biggest obstacle to the blue laser?

Nakamura: The dislocation density problem. The dislocation density of gallium

nitride is still 1010. We didn t reduce that. That s the amazing thing.

Physicists are still wondering why gallium nitride is so efficient in spite of

the large number of dislocations. Nobody knows. Gallium nitride is an amazing

material. Nobody knows what kind of a structure would make the best blue laser

diode with it. I tried many kinds of structures using the two-flow MOCVD.

Finally, at the end of 95, I succeeded. Since that time many other groups have

tried to make the same structures, but they haven t been so successful. The

problem is they use commercial reactors, but they don t get the same quality of

gallium nitride and indium gallium nitride that I do. Their results are

terrible, because of the difference in the reactors. Nobody can imitate my

reactor.

SW: What do you expect to be the major commercial use of the laser?

Nakamura: The main target is for digital video disc players DVDs. The next

generation of DVD players will all use our blue laser diodes.

SW: So it s selling?

Nakamura: Yes. Now my company s total sales of the blue LEDs are around $200

million a year. And the blue lasers are selling at around $2 million a year.

SW: What do you do next?

Nakamura: Right now the blue laser has a lifetime of 10,000 hours, but in that

instance the power is only 5 milliwatts. For DVD use, they need 30 milliwatts

of power, but then the lifetime is much shorter. So I m still working to

lengthen the lifetime at 30 milliwatts. I can only work on one thing at same

time. I can t do new things at the moment. I have to concentrate on this.

SW: Is the R&D division at Nichia still just you?

Nakamura: No. Now it s about 20 people, all of them working on blue laser

diodes.